Dalian Institute Of Chemical Technology And TSMC Have Made Progress In Research On Wafer Hexagonal Boron Nitride Structure

wallpapers Environment 2020-11-23
Recently, Fu Qiang, a researcher at the State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, and Lain-Jong Li, Taiwan Semiconductor Manufacturing Company (TSMC), Wen-Hao Chang, Taiwan Jiaotong University, BI Yakobson, Rice University, and Professor of Peking University Zhang Yanfeng's team worked together to successfully epitaxially grow a monocrystalline hexagonal boron nitride (hBN) monolayer film on a 2-inch wafer substrate.
Hexagonal boron nitride is an important type of two-dimensional semiconductor layered material. How to realize the controllable growth of monocrystalline hexagonal boron nitride films on wafers is a key challenge for the future application of hexagonal boron nitride in integrated circuits. Researchers grow a single crystal copper film without grain boundaries with a surface orientation of (111) on a sapphire substrate and use this as a substrate to further prepare a completely ordered hexagonal boron nitride wafer. The characterization and confirmation of single crystal properties of large-area single-layer thin film structure is a recognized problem in the research of two-dimensional materials.

With the help of the deep-ultraviolet laser PEEM/LEEM equipment developed by the laboratory, the researchers used its unique surface micro-area imaging and diffraction functions to select nearly a hundred micro-scale micro-area on the surface of a 1-inch wafer for structural analysis. The results confirm that the orientation of the hexagonal boron nitride film is completely consistent with that of the Cu(111) substrate surface, confirming the single crystal characteristics of the single layer film.
Related results were published in "Nature" (Nature). This work has been funded by the National Natural Science Foundation of China Science Center Project, the Chinese Academy of Sciences Strategic Leading Science and Technology Special Category B "Essence and Regulation of Energy Chemical Conversion", and the national major scientific research equipment development project.

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